Symmetry and asymmetry from MEMS variable capacitor by nonlinear micro stoppers

Mechanical stoppers in MEMS capacitive systems can dramatically affect electrical performances and result complicated mechanical dynamic responses. This paper introduces electromechanical coupling nonlinear responses variable dual-capacitor with an effect of asymmetrical stoppers. We found that the capacitance circuit system related to first-order derivative output voltage on a load resistor, was strongly affected by up down superposition instantaneous electrostatic force limited space length The numerical calculation results experimental our analysis based had good agreement, simulation presented rich impacts through imposed height dual-capacitive device. device operation cannot reach 0.6 time's initial gap due small forcing amplitude (1.026 g). However, we observed movable plate (across gap) fierce big (4 g) With asymmetric stopper each impact, also concluded would experience attenuations displacement until moment next impacts. Moreover, not only motion plate, but modulate fixed its asymmetry structure.